High Precision Rotation Stages for Ambient and Vacuum



 



PI and PI miCos provide a wide variety of precision rotation stages for high-accuracy and standard precision positioning applications.
Different stage drive concepts, from ironless piezo-motors, air-bearings / torque motors to compact worm-gear rotary positioners with encoded and open-loop stepper-motors to the ultra-low profile, self-locking piezo-motor rotation stages are available in standard and custom designs. Air bearing stages provide extremely accurate motion with minimum wobble and excentricity and are recommended for applcations such as X-ray crystallography.

Piezo-motor-driven stages are self locking at rest, a great advantage when it comes to long term stability and when applications require power to be shut down. The low inertia of the piezo-rotation stages also enables very fast step and settle with minimum overshoot.

In addition to classical worm gear rotation stages for ambient and vacuum environments, goniometer cradles are available, tip/tilt positioners , piezo mirror rotators with fixed center of rotation and even multiaxis parallel positioners such as hexapods with fully programmable center of rotation for three rotary axes.

Miniature and sub-miniature rotary positioners are now available in a variety of sizes, with profiles as low as 7 mm and rotation speeds as high as 1080deg/sec.

Most positioning systems are also available for vacuum and high vacuum environments.

New PDF Brochure: Motorized Ultra High Accuracy Rotation Stage Brochure from PI miCos

 




Ultra-Low Profile Rotation Table with Fast Ironless Piezo-Motor

M-660 PILine« 
Rotation Stage

The M-660 precision rotation stage is the lowest profile rotary table with high-speed direct-drive ceramic piezo motors on the market.
This ironless drive can move at very slow speeds and accelerate quickly to velocities of 720 degrees/sec. Its directly coupled precision optical encoder resolves positions down to 4 Árad (0.00023░), providing phase-lag-free, backlash-free feedback to the servo controller. The self-clamping ceramic drive provides very high stability, with no energy consumption at rest and no heat generation


M-660s can be built in different sizes or with other specifications, and they are available upon request as vacuum-compatible versions.

The low inertia improves the start/stop behavior and velocity control significantly compared to conventional rotation stages, due to the light-weight direct- drive ceramic motor, operating without gears or magnets. The result is precise bidirectional speed and position control, which is critical for high speed motion contouring. These features make the M-660 outperform the stability, acceleration and settling speed of traditional servo motor direct drives and gear-driven mechanisms.
A special motion controller for piezo motors is available to take full advantage of the specific motion characteristics of ultrasonic ceramic motors. USB interfacing and a solid software and driver package (LabView, Matlab, etc) for seamless integration are also included.

PDF Brochure | Specifications / Ordering Info

  • Lowest Profile Direct Drive Stage: Only 14 mm in Height
  • Wide Range of Velocities, up to 720 ░/sec.
  • Ironless Motor
  • Unlimited Travel Range
  • Self-Clamping Ceramic Direct Drive: Energy Saving & High Position Stability
  • Direct Metrology Encoder, up to 4 Árad Resolution
  • Vacuum-Compatible and Non-Magnetic Ultrasonic Motor Working Principle

 


Two ultrasonic piezo motors driving a circular
ceramic runner in an M-660 rotation stage

 

 
Application video of the ultrasonic piezo motor rotary stage in a Leica Theodolite and Principle Design of the PILine drive used in the M-660 PILine« rotary stage




U-628 High-Speed Miniature Rotation Stage with Piezo Motor: 1080 Deg/Sec

 Mini Precision Rotation Stage
  • Ideal for Compact Opto-Mecahnical Set-Ups
  • Very Compact Dimensions (2x2 Inch Footprint)
  • High Speed: 1080 deg/sec (180 RPM)
  • 35 Árad Encoder Resolution
  • Clear Aperture
  • Continuous Rotation
  • Closed-Loop Direct-Drive Ultrasonic Motor

This miniaturized closed-loop rotary positioner is driven by an ultrasonic direct-drive motor and provides high rotational velocity up to 3 deg /second. An optical encoder is integrated for direct position measurement and feedback with 35 Árad resolution.



| PDF Brochure | Specifications / Ordering Info




U-624 Sub-Miniature Rotation Stage with Fast Ultrasonic Motor

 Mini Precision Rotation Stage
 Mini Precision Rotation Stage
  • Only 30x30x12 mm
  • High Speed: 2 Revolutions /sec (120 RPM)
  • 52 Árad Encoder Resolution
  • Ultrasonic Ceramic Motor
  • Vacuum Version Available

This sub-miniature rotation stage is available in vacuum and standard versions. A fast ultrasonic ceramic motor provides high speed to 120 RPM. An optical direct metrology encoder provides 52 Árad resolution.



PDF Brochure | Specifications / Ordering Info




Ultra-Low Profile Mini Rotation Stages with Stick-Slip Piezo Motors

Ultra-compact Rotation Stage
  • Three Sizes: 14, 22, 32 mm Diameter
  • Vacuum Option
  • Low Profile: From 7 mm.
  • Continuous Rotation Range
  • Piezo-Stick-Slip Motor
  • 45 deg/sec
  • Very High Resolution

RPS-series miniature rotation stages are driven by inertia-type piezo motors. These miniaturized stages are direct-driven, backlash free and provide micro-radian resolution. The self-locking design requires no holding current and provides excellent long-term stability. Three different diameters are available: 14 mm, 22 mm and 32 mm.



| Specifications / Ordering Info




Air-Bearing Ultra-Precision Rotation Stages

Air Bearing Rotation Stage
  • Highest Precision and Resolution
  • Torque Motor
  • 3 Standard Diameters
  • Eccentricity as low as 0.07 Microns
  • Wobble as low as 1.25 Árad
  • Repeatability to 0.00003 degrees
  • Max. Velocity 360 degrees/second

The UPR series of air-bearing rotation stages provides the highest accuracy and smoothest motion of any commercially available rotation stage. With three standard diameters from 120 mm to 270 mm and custom designs these stages are designed for reference class applications.



Specifications / Ordering Info




Vacuum Compatible Precision Rotation Stage, High Load / Worm Gear

Vacuum Precision Rotation Stage
 
Air Bearing Rotation Stage
  • High Load Capacity to 50 kg
  • UHV Option
  • Large Aperture
  • High Speed: to 150 deg/sec
  • Continuous Rotation Range
  • Ultra-High Resolution
  • Preloaded Worm Drive for Zero Backlash
  • Servo & Stepper-Motors
  • Direction-Metrology Encoder Option

PRS-200 rotation stages can handle high loads to 50 kg and come with a large aperture for photonics and optics applications. Stepper and servo motors are availabe, direct metrology encoders are optional and a high-vacuum version is also available.

Brochure Vacuum Rotary Stages



Worm Gear Stages Overview |

Vacuum Stage Overview |




M-06x Precision High-Resolution Rotation Tables / Worm Gear Driven

Precision Rotation Stage, Unlimited Travel Range
  • Three Sizes / Load Ranges
  • Vacuum Option
  • High Speed: to 90 deg/sec
  • Continuous Rotation Range
  • Ultra-High Resolution
  • Preloaded Worm Drive for Zero Backlash
  • ActiveDrive DC-Servo, Stepper-Motor, & Manual Drive Option
  • Direction-Sensing Reference Switch

M-06x series rotation stages are equipped with ultra-precise, ultra-low-friction, spring-preloaded worm gear drives allowing unlimited rotation in either direction. Three different turn-table diameters are available: 60 mm, 100mm and 120mm.

Drive Options: Servo Motor, Stepper Motor and Manual Three motor drives are available: Open-Loop Stepper Drives and two closed-loop servo drives with different resolution / speed rating.

PDF Brochure | Specifications / Ordering Info




M-116 Precision Miniature High-Resolution Rotation Table Compact / Worm Gear Driven

M-116 Precision Rotation Stage
  • Miniature Rotation Stage Combines with M-110 Miniature Translation Stages
  • Clear Aperture
  • 2.5 Árad Encoder Resolution, Repeatability ▒10 Árad
  • Max. Velocity 20 degrees/second
  • Home Switch
  • Continuous Rotation Range
  • Preloaded Worm Drive for Zero Backlash

M-116 rotation stages are equipped with low-friction, spring-preloaded worm gear drives allowing unlimited rotation in either direction in an extremely compact package.



PDF Brochure | Specifications / Ordering Info




Additional Precision Rotation Stages and Goniometer Cradles from PI miCos



The PI miCos line of goniometers and rotation stages is specialized on miniature stages with different motor drives (belt-drives, worm-gear drives) and also on ultra-high precision stages with torque motors, direct metrology and air bearings. Most stages are available in high vacuum and UHV specification.

  • High Speed Air Bearing Precision Rotation Stages
  • High-Vacuum and UHV-Copmpatible Rotation Stages
  • Ultra-High Precision Closed-Loop Rotation Stages with Torque Motors
  • Compact Rotation Stages
  • Goniometer Cradles
  • Tip/Tilt Stages

Overview / Specifications of PI miCos precision rotary positioners and goniometers

Download the PI miCos Rotation / Goniometer Stage Brochure




M-880 Rotation + XY Stage: Planar 3-Axis Precision Positioner XY-Rot-Z Parallel Kinematics System with Very High Holding Force

Rotation + XY Stage
  • 8░ Rotation around Z and 20x20mm XY Travel
  • ActiveDrive Servo Motors
  • Static Load Capacity to 150 kg
  • Low Profile through Parallel Kinematics
  • Min. Incremental Motion to 0.75Ám
  • Large Clear Aperture
  • Controller Included

This parallel-kinematics 3-axis precision positioning system combines rotation around Z and linear travel in the X and Y axes in a very low profile package.

The extremely low profile of just 105 mm is made possible because all actuators are directly connected to the single moving platform, as opposed to stacking a rotation stage on top of an XY table.

PDF Brochure | Specifications / Ordering Info




M-811 Vacuum-Hexapod: 3 x Rotation + XYZ = 6 DOF, High Precision and Very Versatile

Miniature Vacuum-Hexapod
  • Rotation around X, Y, Z + Linear XYZ Motion
  • Vacuum Compatible
  • Specialized 6-D Controller & Software Included
  • Rotation to 40 Degrees
  • Linear Motion Range to 34x32x13 mm
  • Load Capacity to 5 kg
  • Actuator Resolution 40 Nanometers
  • Min. Incremental Motion to 200 Nanometers
  • Repeatability up to ▒ 200 Nanometers
  • Velocity to 10 mm/s

This Hexapod provides rotation around 3 axes and 3 linear motions in one compact, vacuum-compatible package. It can handle loads up to 11 lbs (5kg) and move at velocities to 10 mm/sec. The combination of linear motion and rotation angles of 20░ around the X and Y axis and up to 40░ around the vertical axis allows for complex motion profiles with particularly flexible placement of the load - a great advantage in restricted areas (such as beam lines) and small vacuum chambers.



PDF Brochure | Specifications / Ordering Info




P-528 Precision Piezo Z/Tip/Tilt Stage: 2 x Rotation + Z

Precision Piezo Z/Tip/Tilt Stage
  • Z Motion + Two Rotations around the X and Y Axis.
  • Up to 2 mrad Rotation with Nano-Radian Resolution
  • Parallel Kinematics / Metrology for Enhanced Responsiveness & Multi-Axis Precision
  • Frictionless, High-Precision Flexure Guiding System
  • Capacitive Feedback Provides Higher Linearity

P-5x8 series, Z/tip/tilt nanopositioners are open-frame, high-resolution, piezo-driven stages providing Z motion to 240 Ám and rotation around X and Y to 2.4 mrad with resolutions of up to 0.5 nm and 50 nrad. The 66 x 66 mm clear aperture is ideal for transmitted-light applications.



PDF Brochure | Specifications / Ordering Info



2 x Precision Rotation: Tip/Tilt Positioning Table, Piezo Drive Option for Nanometer Precision


Tip/Tilt Stage
  • 1 & 2-Axis Positioners with Rotation Around X and Y
  • High Resolution to 0.5 ÁRad
  • Preloaded for Zero Backlash
  • Resolution to 0.5 Árad with Piezo Option
  • Manual and Servo Motor Drives
  • Piezo Drive Option for Tracking /Scanning Applications

These stages provide rotation up to 9 degrees around the X and Y axis with resolution as high as 0.5 Árad, when equipped with the piezo option. The piezo drive option also increases the dynamic range for scanning and tracking applications.

PDF Brochure | Specifications / Ordering Info




S-334 2-Axis Rotational Piezo Mirror Positioner, Fast Steering Mirror with up to 120 mrad Deflection

Miniature Piezo Tip/Tilt-Mirror
  • Coplanar Rotation Axes & Fixed Pivot Point; No More Polarization Rotation
  • Optical Beam Deflection to 120 mrad (~ 6.8░)
  • Resolution to 200 Nano Radians
  • Very Fast: Millisecond Response
  • Closed-loop Position Servo-Control for High Accuracy
  • Frictionless, High-Precision Flexure Guiding System

The S-334 miniature platforms rotate a mirror up to 60 mrad (120 mrad optical deflextion) around the X and Y axes. These fast mirror scanners are based on solid-state piezo drives and a parallel-kinematics flexure guiding system, with two coplanar, orthogonal axes and a fixed pivot point.



PDF Brochure | Specifications / Ordering Info




S-340 2-Axis Rotational Piezo Mirror Positioner, Fast Steering Mirror for Optics to 4ö Diameter

Piezo Tip / Tilt-Platform
  • Coplanar Rotation Axes & Fixed Pivot Point; No Polarization Rotation
  • Optical Beam Deflection to 4 mrad
  • Resolution to 20 Nano Radians
  • Excellent Temperature Stability
  • Very Fast: Millisecond Response
  • Closed-loop Position Servo-Control for High Accuracy
  • Frictionless, High-Precision Flexure Guiding System

This piezo platform can rotate a mirror or optic up to 2 mrad (4 mrad optical deflection) around two orthogonal axes. The parallel-kinematic, solid-state piezo drive system guarantees exceptional precision and very fast response in the low millisecond range and below.

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S-224 Piezo Mirror Tilter: Rotation with 50 Nano-Radian Resolution

High-Speed Miniature Piezo Tilt Mirror
  • Sub-Árad Resolution
  • Sub-Millisecond Response
  • Up to 4.4 mrad Optical Beam Deflection
  • Closed-Loop Versions for Better Linearity
  • Includes BK7 Mirror
  • Zero Friction Flexure Guiding System

S-224/S-226 miniature tilt platforms provide rotation of 2.2 mrad around the Y-axis. They are extremely fast with resonse in the microsecond range. A ě15x4mm BK7 glass mirror is mounted.



PDF Brochure | Specifications / Ordering Info




Two ultrasonic piezo motors driving a circular ceramic runner in an M-660 rotation stage

Ultra-slow motion animation of the PILine« ultrasonic piezo motor. The ceramic tip (pusher) is moving on an pseudo-elliptical trajectory. In reality the tip only moves a few nanometers at frequencies to 100's of kHz.